Special Sessions

Invited Talk

• 13:30-14:30, Tuesday, 11 November
  • Dr. Tomoaki Hiruta（Hitachi, Ltd.）
    「Generative AI-assisted knowledge building for equipment and maintenance, and developing maintenance applications」
• 13:26-14:26, Wednesday, 12 November
  • Dr. Hiroshi Akahori（Rapidus Co., Ltd.）
    「Rapidus’ Challenge and the Inspection and Measurement Technology that Supports It」
• 09:30-10:30, Thursday, 13 November
  • Prof. Tetsuo Kodera（Institute of Science Tokyo）
    「Fundamentals and Trends of Semiconductor Quantum Bit Research」

Tutorial

• 13:15-15:15, Thursday, 13 November
  • Prof. Yongzhao Yao（Mie University）
    「Visualization Technology for Lattice Defects Distributed over the Entire Surface of a Semiconductor Wafer」

Authors Corner

Authors corner, a place for audience to meet with and discuss with authors, will be given just after the sessions (except for commercial sessions).

Luncheon Seminor

A Luncheon Seminar will be held during the lunch break (free of charge). Advance registration is required, so please check the seminar you wish to attend when you register for the symposium.

• 12:15-13:30, Tuesday, 11 November
  • Organizer
    • Hitachi High-Tech Corporation
  • Theme
    • to be decided
• 12:11-13:26, Wednesday, 12 November
  • Organizer
    • JEOL Ltd.
  • Theme
    • to be decided

Evenint Session

Evening session of NANOTS is a special session for discussing on research trend around the world and the future perspective. The session will be held on 18:00–20:00, Wednesday, 12 November. (Senri Life Science Center 5F Life Hall ).

• “Recent activities related to semiconductor failure analysis technology in JEITA (Japan Electronics and Information Technology Industries Association) and REAJ (Reliability Engineering Association of Japan)” by Dr. Kiyoshi Nikawa, Device Evaluation Technology Laboratory

Exhibition and Commercial Session

The Symposium will feature the latest in service providers, equipment manufacturers and suppliers. A large exhibit floor will give the opportunity to key-vendors to represent the core business area in these fields. Furthermore, a commercial session will give the opportunity to introduce new products with short presentation.