The invited talks (3 papers) and the Tutorial for the NANOTS2025 symposium have been confirmed.
Invited Talk
- Hiroshi Akahori, Rapidus Co., Ltd.
- “Rapidus’ Challenge and the Inspection and Measurement Technology that Supports It (tentative title)”
- Tetsuo Kodera, Institute of Science Tokyo
- “Fundamentals and Trends of Semiconductor Quantum Bit Research (tentative title)”
- Tomoaki Hiruta, Hitachi, Ltd.
- “Generative AI-assisted knowledge building for equipment and maintenance, and developing maintenance applications (tentative title)”
Tutorial
- Yongzhao Yao, Mie University
- “Visualization Technology for Lattice Defects Distributed over the Entire Surface of a Semiconductor Wafer”
